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Cases
Optimizing Wafer Inspection with Air Bearing Stages
The implementation of LAB Motion Systems’ air bearing stages for patterned wafer inspection has delivered significant improvements in inspection efficiency and accuracy.
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.
The 5-Axis Motion Machine
A 5-axis motion machine incorporates a rotary stage positioned on top. This machine is a significant breakthrough for our client, as it opens up new possibilities in X-ray and CT imaging for a wide range of objects.
4 Axis Motion System
A combination of standard products, customized products and a custom developed air bearing vertical stage. All axis can be driven and synchronized by LAB’s motion controllers or with commercially available controllers.
Gyro Calibration
A gimbal setup was made with 2 stages of our standard RT-BP range. These ball bearing stages with strong torque motors enable the highest dynamic movements without compromising the micrometer level precision.
i-CT Multi-Axis Sample Manipulator
A system was developed for advanced measuring tasks. Air bearing axis and a rotary stage are combined to realize object manipulation in the µm-range on a large volume.
RT Series & Slip Ring
Rotary stages for CT applications are frequently equipped with a slip ring. We accumulated the know-how on slip ring integration and rotary unions. Integrating them without compromising the precision of the stage.
Air Bearing for Lens Alignment
An ultra-precise rotary stage for aligning optics for lithography systems. The challenge was to combine the high load requirement with nano meter level error motions. The wobble of the stage needed to be exceptionally low.
Sample Stage for 3D Imaging
A large size sample stage was developed in cooperation with the ESRF (ID19) to position and scan samples for high resolution multi-scale microtomography and laminography. We explore this 5 axis system.
