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RT100AS
Type: air bearing
Load: 20 kg
Precision: < 100 nm
Speed: 200 RPM
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RT500AS
Type: air bearing
Load: 830 kg
Precision: < 100 nm
Speed: 60 RPM
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XY150B-12
Pair with rotary stages
Load: 10 kg
Incr. motion: 0,1 µm
Stroke: ± 6 mm
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XY250B-100
Pair with rotary stages
Load: 80 kg
Incr. motion: 0,1 µm
Stroke: ± 50 mm
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