Case study
Sample stage for 3D imaging
A large size sample stage was developed in cooperation with the ESRF (ID19) to position and scan samples for high resolution multi-scale microtomography and laminography. The 5 axis system has a 600 mm long vertical stroke allowing to scan large objects using helical scanning techniques. The 500 mm horizontal linear axis allows scanning of large 2D samples and recording “bright-field” images (without sample in the beam) for data normalization and correction
Since we delivered it, this system has become the popular workhorse for doing a wide variety of measurements.
A similar custom made solution can be made for your requirements. At LAB Motion Systems we specialize in turning your exceptions in a great solution.
“This system has become our customers’ popular workhorse for measurements tasks.”
Kurt Smets – Product Development Manager
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The 5-Axis Motion Machine
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Optimizing Wafer Inspection with Air Bearing Stages
The implementation of LAB Motion Systems’ air bearing stages for patterned wafer inspection has delivered significant improvements in inspection efficiency and accuracy.
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.