Case study

Air bearing for lens alignment

This customer needed an ultra-precise rotary stage for aligning optics for lithography systems. The challenge in this project was to combine the high load requirement with nano meter level error motions. As the optics assembly was very high the wobble of the rotation stage needed to be exceptionally low.

A modified version of the RT500 was developed to cope with the 1500 kg payload.

Radial error motion were measured at different heights to characterize the wobble of the stage.
The polar plots below show the radial error motion at 200 mm , 253, 306 and 359 mm above the top surface of the rotary stage. The wobble was only 0,027 arcsec resulting in a radial error motion of 300 nm 2 meter above the rotary stage.

“The challenge was to combine the high load requirement with nano meter level error motions.”

Kurt Smets – Product Development Manager

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A combination of standard products, customized products and a custom developed air bearing vertical stage. All axis can be driven and synchronized by LAB’s motion controllers or with commercially available controllers.

read more
Gyro Calibration

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A gimbal setup was made with 2 stages of our standard RTBT range. These ball bearing stages with strong torque motors enable the highest dynamic movements without compromising the micrometer level precision.

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