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Case study
Air bearing for lens alignment
This customer needed an ultra-precise rotary stage for aligning optics for lithography systems. The challenge in this project was to combine the high load requirement with nano meter level error motions. As the optics assembly was very high the wobble of the rotation stage needed to be exceptionally low.
“The challenge was to combine the high load requirement with nano meter level error motions.”
Kurt Smets – Product Development Manager
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The WS13 vertical lift stage
The WS13 vertical lift stage from LAB Motion Systems delivers unmatched vertical motion control with 30 kg load capacity, nanometer precision, and high-speed dynamics—perfect for demanding semiconductor, photonics, and inspection applications.
Optimizing Wafer Inspection with Air Bearing Stages
LAB Motion Systems optimized patterned wafer inspection with air bearing stages, achieving ≤50 ms settling time. The XYTZ stage enhances speed, stability, and accuracy in semiconductor manufacturing.
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.
The WS13 vertical lift stage
The WS13 vertical lift stage from LAB Motion Systems delivers unmatched vertical motion control with 30 kg load capacity, nanometer precision, and high-speed dynamics—perfect for demanding semiconductor, photonics, and inspection applications.
Optimizing Wafer Inspection with Air Bearing Stages
LAB Motion Systems optimized patterned wafer inspection with air bearing stages, achieving ≤50 ms settling time. The XYTZ stage enhances speed, stability, and accuracy in semiconductor manufacturing.
