Case study
Air bearing for lens alignment
This customer needed an ultra-precise rotary stage for aligning optics for lithography systems. The challenge in this project was to combine the high load requirement with nano meter level error motions. As the optics assembly was very high the wobble of the rotation stage needed to be exceptionally low.
“The challenge was to combine the high load requirement with nano meter level error motions.”
Kurt Smets – Product Development Manager
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Optimizing Wafer Inspection with Air Bearing Stages
The implementation of LAB Motion Systems’ air bearing stages for patterned wafer inspection has delivered significant improvements in inspection efficiency and accuracy.
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.