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Case study
Air bearing for lens alignment
This customer needed an ultra-precise rotary stage for aligning optics for lithography systems. The challenge in this project was to combine the high load requirement with nano meter level error motions. As the optics assembly was very high the wobble of the rotation stage needed to be exceptionally low.
A modified version of the RT500 was developed to cope with the 1500 kg payload.
“The challenge was to combine the high load requirement with nano meter level error motions.”
Kurt Smets – Product Development Manager
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All cases
4 Axis Motion System
A combination of standard products, customized products and a custom developed air bearing vertical stage. All axis can be driven and synchronized by LAB’s motion controllers or with commercially available controllers.
Gyro Calibration
A gimbal setup was made with 2 stages of our standard RTBT range. These ball bearing stages with strong torque motors enable the highest dynamic movements without compromising the micrometer level precision.
i-CT Multi-Axis Sample Manipulator
A system was developed for advanced measuring tasks. Air bearing axis and a rotary stage are combined to realize object manipulation in the µm-range on a large volume.
4 Axis Motion System
A combination of standard products, customized products and a custom developed air bearing vertical stage. All axis can be driven and synchronized by LAB’s motion controllers or with commercially available controllers.
Gyro Calibration
A gimbal setup was made with 2 stages of our standard RTBT range. These ball bearing stages with strong torque motors enable the highest dynamic movements without compromising the micrometer level precision.
