Product finder
Call us
Case study
Air bearing for lens alignment
This customer needed an ultra-precise rotary stage for aligning optics for lithography systems. The challenge in this project was to combine the high load requirement with nano meter level error motions. As the optics assembly was very high the wobble of the rotation stage needed to be exceptionally low.
A modified version of the RT500 was developed to cope with the 1500 kg payload.
“The challenge was to combine the high load requirement with nano meter level error motions.”
Kurt Smets – Product Development Manager
Featured products
More products
Drivebox
RT500S
Air filter
More stories
All cases
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.
The 5-Axis Motion Machine
A 5-axis motion machine incorporates a rotary stage positioned on top. This machine is a significant breakthrough for our client, as it opens up new possibilities in X-ray and CT imaging for a wide range of objects.
4 Axis Motion System
A combination of standard products, customized products and a custom developed air bearing vertical stage. All axis can be driven and synchronized by LAB’s motion controllers or with commercially available controllers.
Case study with Siemens: Smart Virtual Sensing
This study in collaboration with Siemens shows how implementing smart virtual sensing in our air bearing systems can improve the estimates of critical machine parameters at a low cost.
The 5-Axis Motion Machine
A 5-axis motion machine incorporates a rotary stage positioned on top. This machine is a significant breakthrough for our client, as it opens up new possibilities in X-ray and CT imaging for a wide range of objects.
