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Semiconductor
Testing the smallest, down to nanometer level motion
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Ultra-precision movement
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Outsource the motion platform
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“A close and trusted working relation leads us to become your motion department.”
Xiaokun Yang – Sales Manager
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Absolute encoder option
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Air Bearing for Lens Alignment
An ultra-precise rotary stage for aligning optics for lithography systems. The challenge was to combine the high load requirement with nano meter level error motions. The wobble of the stage needed to be exceptionally low.
Air Bearing for Lens Alignment
An ultra-precise rotary stage for aligning optics for lithography systems. The challenge was to combine the high load requirement with nano meter level error motions. The wobble of the stage needed to be exceptionally low.
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Discover more markets and industries that benefit from our renowned level of precision and quality.
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