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Air Bearing for Lens Alignment
An ultra-precise rotary stage for aligning optics for lithography systems. The challenge was to combine the high load requirement with nano meter level error motions. The wobble of the stage needed to be exceptionally low.
Air Bearing for Lens Alignment
An ultra-precise rotary stage for aligning optics for lithography systems. The challenge was to combine the high load requirement with nano meter level error motions. The wobble of the stage needed to be exceptionally low.
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