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RT100S

Air Bearing Rotary Stage

High performance in a small package.

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Key Features

The RT100S is the ideal solution when precision, high speed and compactness are required in one unit. The lightweight and compact build serves as the ideal choice for high-dynamic and accurate positioning tasks in various applications. Ideally suited as final top rotation axis in a multi-axis system.

Error Motion

< 100 nm
Max. Speed

200 RPM

Max. Load

264 N
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Specifications

Bearing type

air bearing

Max. speed

200 RPM

Max. axial load

264 N

Max. radial load

78 N

Radial error motion

< 100 nm

Axial error motion

< 50 nm

Min. resolution

Angular accuracy

10,3 arcsec

Wobble

Nominal torque

0,13 Nm

Peak torque

0,40 Nm

Total mass

1,6 kg

Roundness
error motion (typical value): LSC Δr = 52,9 nm
filter: 360 UPR, 1 revolution (9,6 rpm)
Max. working load vs. eccentricity

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