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RT500S

Air Bearing Rotary Stage

Bigger is better.

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Key Features

The RT500S is LAB’s workhorse when precise movement of heavy loads is required. The high load capacity however doesn’t compromise its exquisite better than 100 nm precision. Due to its modular design it can easily be equipped with a slipring, rotary union or XY stage. The RT500S can be offered with a custom-designed granite support for easy integration in your system.

Error Motion

< 100 nm
Max. Speed

60 RPM
Max. Load

8300 N
Aerospace
Metrology
Semiconductor

Specifications

Bearing type

air bearing

Max. speed

60 RPM

Max. axial load

8300 N

Max. radial load

2570 N

Radial error motion

< 100 nm

Axial error motion

< 50 nm

Min. resolution

Angular accuracy

± 2,9 arcsec

Wobble

Nominal torque

3 Nm

Peak torque

9 Nm

Total mass

175 kg

Roundness
error motion (typical value): LSC Δr = 50,1 nm
filter: 360 UPR, 1 revolution (9,6 rpm)
Max. working load vs. eccentricity

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