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Key Features
The RT500S is LAB’s workhorse when precise movement of heavy loads is required. The high load capacity however doesn’t compromise its exquisite better than 100 nm precision. Due to its modular design it can easily be equipped with a slipring, rotary union or XY stage. The RT500S can be offered with a custom-designed granite support for easy integration in your system.
Error Motion
< 100 nm
Max. Speed
60 RPM
Max. Load
8300 N
Aerospace
Metrology
Semiconductor
Specifications
| Bearing type | air bearing |
|---|---|
| Max. speed | 60 RPM |
| Max. axial load | 8300 N |
| Max. radial load | 2570 N |
| Radial error motion | < 100 nm |
| Axial error motion | < 50 nm |
| Min. resolution | – |
| Angular accuracy | ± 2,9 arcsec |
| Wobble | – |
| Nominal torque | 3 Nm |
| Peak torque | 9 Nm |
| Total mass | 175 kg |
Roundness
error motion (typical value): LSC Δr = 50,1 nm
filter: 360 UPR, 1 revolution (9,6 rpm)
filter: 360 UPR, 1 revolution (9,6 rpm)
Max. working load vs. eccentricity
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