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GT300MA

Gantry Stage

Built for optical inspection tasks.

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Key Features

This double axis motion stage consists of two air bearing axis. The bottom one uses a solid granite base with a moving granite platform on top. On the gantry the second axis has a moving steel platform running over a granite bridge. A sub-micron flatness is achieved making this system ideally suited for inspection machines with the highest demands in precision motion and positioning. Our team created a modular system, so please get in touch if you have a special request for a gantry system.

Load capacity up to 50 kg

Stroke 310 x 310 mm

Precision air bearing for ultra-smooth motion

Extreme low sub-micron flatness error

Specifications

Stroke

310 x 310 mm

Size moving platform X

450 x 450 mm

Outer dimensions LxWxH

1050 x 920 x 850 mm

Total mass

950 kg

Load capacity X

50 kg

Load capacity Y

8 kg

Speed

300 mm/s

Acceleration

0,5 m/s²

Encoder resolution

20 nm

Repeatability

0,1 µm

Accuracy

< 1 µm

Flatness X , Y

1 µm

XY combined flatness over 300 x 300 mm area

< 1 µm

XY orthogonality

10 µrad

Pitch

± 5 µrad

Yaw

± 5 µrad

Roll

± 5 µrad

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