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Built for optical inspection tasks.
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Key Features
This double axis motion stage consists of two air bearing axis. The bottom one uses a solid granite base with a moving granite platform on top. On the gantry the second axis has a moving steel platform running over a granite bridge. A sub-micron flatness is achieved making this system ideally suited for inspection machines with the highest demands in precision motion and positioning. Our team created a modular system, so please get in touch if you have a special request for a gantry system.
Load capacity up to 50 kg
Stroke 310 x 310 mm
Precision air bearing for ultra-smooth motion
Extreme low sub-micron flatness error
Specifications
| Stroke | 310 x 310 mm |
|---|---|
| Size moving platform X | 450 x 450 mm |
| Outer dimensions LxWxH | 1050 x 920 x 850 mm |
| Total mass | 950 kg |
| Load capacity X | 50 kg |
| Load capacity Y | 8 kg |
| Speed | 300 mm/s |
| Acceleration | 0,5 m/s² |
| Encoder resolution | 20 nm |
| Repeatability | 0,1 µm |
| Accuracy | < 1 µm |
| Flatness X , Y | 1 µm |
| XY combined flatness over 300 x 300 mm area | < 1 µm |
| XY orthogonality | 10 µrad |
| Pitch | ± 5 µrad |
| Yaw | ± 5 µrad |
| Roll | ± 5 µrad |
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GT600LA
Stroke: 610 x 610 mm
Load: 150 kg
Resolution: 20 nm
Speed: 300 mm/s
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GT300LA
Stroke: 310 x 310 mm
Load: 150 kg
Resolution: 20 nm
Speed: 300 mm/s
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XY250B-100
Pair with rotary stages
Load: 80 kg
Incr. motion: 0,1 µm
Stroke: ± 50 mm
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XY150B-12
Pair with rotary stages
Load: 10 kg
Incr. motion: 0,1 µm
Stroke: ± 6 mm
