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Key Features
The PL100 planar stage has two axes that are both floating over the same base granite. Therefore the top axis air bearing is not floating over the lower axis, as it would be in a stacked setup, but directly over the base granite. Both axes can move independently from each other and that there is no mechanical coupling between both axes. Major benefit is that the stiffness doubles and precision increases. The XY motion platform moves at high speeds and floats only microns above the precision granite base. With or without load it offers a dynamic, smooth and repeatable movement.
Stroke 100 x 100 mm
High dynamic planar air bearing with sub-micron precision
Granite gantry for highest precision
Absolute linear encoders
Specifications
| Stroke | 100 x 100 mm |
|---|---|
| Outer dimensions moving platform | 250 x 250 mm |
| Load capacity | 30 kg |
| Speed | 1 m/s |
| Acceleration | 10 m/s² |
| Encoder resolution | 1 nm |
| Repeatability | 0,1 µm |
| Accuracy X | ± 0,3 µm |
| Accuracy Y | ± 0,3 µm |
| Flatness | ± 0,3 µm |
| XY combined flatness over 300 x 300 mm area | ± 1 µm |
| Straightness X , Y | ± 0,3 µm |
| XY orthogonality | 10 µrad |
| Pitch | ± 3 µrad |
| Yaw | ± 3 µrad |
| Roll | ± 3 µrad |
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