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ZS100B-LM

Z Stage

Enable precise height adjustments.

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Key Features

The vertical Z-stage ZS100 offers a stroke of 100 mm and can be ordered with three different kinds of motor options. With a load capacity of 15 or 25 kg (depending on motor selection) the ZS100 can easily lift an air bearing rotary stage with an integrated XY and your sample. We can supply an L-bracket to mount the stage in your machine or lab.

Travel distance 100 mm

Size of moving platform 300 x 190 mm

Linear motor

Incremental or absolute encoder options

Specifications

Travel

100 mm

Motor type

linear motor

Load capacity

20 kg

Size moving platform

300 x 190 mm

Total mass

12 kg

Speed

500 mm/s

Acceleration

10 m/s²

Accuracy

± 0,5 µm

Encoder resolution

1,5, … 1000 nm

Repeatability

± 75 nm

Flatness

± 1 µm

Straightness

± 1 µm

Pitch

± 70 µrad

Yaw

± 100 µrad

Roll

± 70 µrad

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