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LS100

Linear Stage

Optimized for unrivaled precision.

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Key Features

The LS100 features an optimized air bearing design ensuring optimal stiffness, damping, workload and running precision. Ironless linear drives and high-accuracy optical linear encoders lead to an unrivaled precision. The LS-series includes a wide range of high-precision linear stages for various applications.

Travel distance 100 mm

Size of moving platform 238 x 248 mm

Optimized air bearing design

Ironless linear drives and high-accuracy optical linear encoders

Specifications

Travel

100 mm

Load capacity

50 kg

Size moving platform

238 x 248 mm

Total mass

35 kg

Speed

1 m/s

Acceleration

10 m/s²

Accuracy

± 0,3 µm

Encoder resolution

1,5, … 1000 nm

Repeatability

0,1 µm

Flatness

± 0,5 µm

Straightness

± 0,25 µm

Pitch

± 3 µrad

Yaw

± 4 µrad

Roll

± 3 µrad

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