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- 4 Axis Motion System

4 axis motion ct system overview

Specifications

X-stage---------
Travel1000 mm
Min. incr. motion0,1 µm
Hor. straightness± 0,4 µm
Vert. straightness± 0,4 µm
Pitch± 2 µrad
Roll± 2 µrad
Yaw± 3 µrad
Z-stage---------
Travel300 mm
Min. incr. motion0,1 µm
Hor. straightness± 0,2 µm
Vert. straightness± 1,0 µm
Pitch± 7 µrad
Roll± 2 µrad


4 Axis Motion System

This 4-axis system is a combination of standard products, customized products and a custom developed air bearing vertical stage.

This custom developed XXZƟ-motion system is 2,4 meters long and contains two horizontal air bearing stages with a travel of 1 meter each. They run on the same granite base, guaranteeing a perfect alignment. On one horizontal air bearing stage, a vertical air bearing stage is built that holds a standard LAB RT150S air bearing rotary stage. All axes can be driven and synchronized with LAB’s motion controllers or with commercially available controllers.

System Features

RT150S rotary stage

Custom z-stage

Custom z-stage

Other Systems

  • X-stage
  • Travel
  • Min. incr. motion
  • Hor. straightness
  • Vert. straightness
  • ---------
  • 1000 x 500 mm x mm
  • 0,1 µm
  • ± 0,5 µm
  • ± 0,5 µm